Designing Heating Zones in a Wafer Heater for Better Thermal Balance

https://advanced-thermal-systems.keystonescope.com/posts/pi-heater-basics-a-simple-guide-to-thin-flexible-heating-technology

In wafer heating chucks, a wafer heater must deliver heat in a controlled way. It uses a controlled heating assembly designed to warm a wafer support or chuck. One useful trait is multi-zone control. Still, sensor offset can change the result