Integrating a Wafer Heater Into Compact OEM Assemblies

https://advanced-heater-source.terracolumn.com/posts/how-a-wafer-heater-supports-controlled-thermal-processing

In wafer heating chucks, a wafer heater must deliver heat in a controlled way. It uses a controlled heating assembly designed to warm a wafer support or chuck. One useful trait is multi-zone control. Still, sensor offset can change the result